PNEUMATIC CONTROL SYSTEM AND METHOD FOR SHAPING DE

专利名称：PNEUMATIC CONTROL SYSTEM AND

METHOD FOR SHAPING DEFORMABLEMIRRORS IN LITHOGRAPHIC PROJECTIONSYSTEMS

发明人：GUZMAN, Andrew, J.,LA FIANDRA,

Carlo,SIDOR, Ronald, P.,IVALDI, Jorge,S.,NELSON, Michael, L.

申请号：EP01959590.9申请日：20010808公开号：EP1307777B1公开日：20051221

摘要：A system for adjusting a deformable mirror comprising a reaction plate, aplurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures couple on a first end to the pneumatic actuators, and coupled on a secondend to the non-reflective side the deformable mirror, the plurality of push-pull flexuresbeing disposed at various locations on the back of the deformable mirror. The respectivepairs of push-pull flexures and pneumatic actuators are operated to support and alterthe shape of the deformable mirror to allow for correction of a plurality of opticalaberrations.

申请人：ASML HOLDING NV

地址：NL

国籍：NL

代理机构：Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät

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