专利名称:Exchange-coupling film and, magneto-resistance effect element and magnetichead using thereof
发明人:Hiromi Fuke,Kazuhiro Saito,Shin-ichi
Nakamura,Hitoshi Iwasaki,Masashi Sahashi
申请号:US09/053651申请日:19980402公开号:US05976713A公开日:19991102
摘要:An exchange-coupling film has an antiferromagnetic film consisting of anantiferromagnetic alloy such as an RMn alloy or an RMnFe alloy (R is at least one kind ofelement selected from Ir, Rh, Pt, Au, Ag, Co, Pd, Ni, Cr, Ge, Ru and Cu) and a ferromagneticfilm stacked with the antiferromagnetic film. The antiferromagnetic film is oriented in itsplane. Further, the antiferromagnetic film has a large grain diameter of such as 5 nm ormore. The antiferromagnetic film can be obtained by forming a film with an alloy targetof which oxygen content is 1% by weight or less. An exchange-coupling film using such anantiferromagnetic film has exchange-coupling force enough large at room temperatureand high temperature region together with excellent corrosion resistance or heatresistance. The exchange-coupling film is provided with an electrode for energizing anelectric current to the ferromagnetic film and is used as, for example, a spin valve typemagneto-resistance effect element.
申请人:KABUSHIKI KAISHA TOSHIBA
代理机构:Finnegan, Henderson, Farabow, Garrett & Dunner, LP.
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