专利名称：Apparatus for observing a sample with a
particle beam and an optical microscope
发明人：Agronskaja, Alexandra,Koster,
Abraham,Verkleij, Adrianus,Gerritsen, Hans
申请号：EP08150931.7申请日：20080201公开号：EP1953792B1公开日：20120516
摘要：The invention relates to an apparatus for observing a sample (1) with a TEMcolumn and an optical high resolution scanning microscope (10). The sample positionwhen observing the sample with the TEM column differs from the sample position whenobserving the sample with the optical microscope in that in the latter case the sample istilted towards the light-optical microscope. By using an optical microscope of thescanning type, and preferably using monochromatic light, the lens elements (11) of theoptical microscope facing the sample position can be sufficiently small to be positionedbetween the pole faces (8A, 8B) of the (magnetic) particle-optical objective lens (7). This isin contrast with the objective lens systems conventionally used in optical microscopes,which show a large diameter. Furthermore the optical microscope, or at least the parts(11) close to the sample, may be retractable so as to free space when imaging in TEMmode.
申请人：FEI CO
地址：US
国籍：US
代理机构：Bakker, Hendrik
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