METHOD OF FORMING OPENINGS IN SELECTED MATERIAL

专利名称：METHOD OF FORMING OPENINGS IN

SELECTED MATERIAL

发明人：WENHAM, STUART, ROSS,LENNON,

ALISON,UTAMA, ROLAND,

YUDADIBRATA,HO-BAILLIE, ANITA, WING, YI

申请号：AU2008000023申请日：20080110

公开号：WO2008092186A8公开日：20090924

摘要：A method is provided for forming an opening in a layer of a selected material.The method comprises, forming a polymer resist layer over said selected material andplasticising areas of the resist where openings are to be formed. The plasticising isperformed by depositing a first solution onto the surface of said polymer resist layer,where the first solution is a plasticiser selected to increase permeability of the polymerresist layer to a second solution, in an area which has absorbed the first solution. Thesecond solution is selected to be an etchant or solvent for the selected material. Afterthe resist layer has been selectively plasticised, it is contacted with the second solution,which permeates the polymer resist layer in the area of increased permeability and formsan opening in the selected material.

申请人：NEWSOUTH INNOVATIONS PTY LIMITED,WENHAM, STUART, ROSS,LENNON,ALISON,UTAMA, ROLAND, YUDADIBRATA,HO-BAILLIE, ANITA, WING, YI

代理人：F B RICE & CO

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